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Semiconductor
Wafer Processing Equipment (Front End)
Diffusion & Oxidation
Lithography & Photoresist
Dry Etching
Wet Processing
Wafer Cleaning
Metrology & Inspection
LAM Spares
Request Web Site Assistance
Request for Additional Equipment
LAM Cooling Ring Upper Electrode, p/n 715-011502-001
LAM Cap Lower Electrode, p/n 715-011985-106
LAM Wafer Holder, p/n 715-021741-006
LAM Insulator Ring Upper Electrode, p/n 716-011536-001
LAM Orifice Filler w/c, p/n 716-011570-001
LAM Ring Clamp Lower Electrode, p/n 716-011623-001
LAM Insulator Ring Lower Electrode, p/n 716-011624-001
LAM Plate w/Attachment, p/n 716-011923-001
LAM Edge Sensor Assembly, p/n 853-012500-002
LAM Lower Edge Focus Ring, p/n 716-020904-016
LAM Electrode Clamp Ring, p/n 716-028028-004
Chemical Deposition (CVD)
Wafer Handling & Robotics
Parts & Subsystems
Misc.
Test and Assembly (Back End)
LAM Spares
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Request Web Site Assistance
Request for Additional Equipment
LAM Cooling Ring Upper Electrode, p/n 715-011502-001
..........................
..........................
..........................
LAM Cap Lower Electrode, p/n 715-011985-106
LAM Wafer Holder, p/n 715-021741-006
LAM Insulator Ring Upper Electrode, p/n 716-011536-001
..........................
..........................
..........................
LAM Orifice Filler w/c, p/n 716-011570-001
(Out of Stock)
LAM Ring Clamp Lower Electrode, p/n 716-011623-001
LAM Insulator Ring Lower Electrode, p/n 716-011624-001
..........................
..........................
..........................
LAM Plate w/Attachment, p/n 716-011923-001
LAM Edge Sensor Assembly, p/n 853-012500-002
LAM Lower Edge Focus Ring, p/n 716-020904-016
..........................
LAM Electrode Clamp Ring, p/n 716-028028-004
